Integrated Circuits Fabrication Laboratory
Experimental studies of silicon oxidation, solid-state diffusion, photolithographical materials and techniques, bonding, and encapsulation. Fabrication and testing of PN diodes, NPN transistors and MOS transistors.
Details
- Course Number: ELEG 5293L
- Course Name: Integrated Circuits Fabrication Laboratory
- Times Offered: Irregular
- Meeting Location: HiDEC cleanroom (HDEC-101)
- Instructor(s)
Prerequisites
- ELEG 5213 – Integrated Circuit Fabrication Technology
- ELEG 4203 – Semiconductor Devices